ENMA640
Advanced Nano Processing of Materials with Plasma
Plasmas are used to control the micro-and Nanoscale level structure of materials including patterning at the micro-and nanoscale level using plasma etching techniques. The course establishes the scientific understanding required for the efficient production of nano-structure using plasma techniques.
Past Semesters
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During the Spring 2020 and Spring 2021 semesters, students could choose to take some of their courses pass-fail mid-semester which skews grade data aggregated across multiple semesters.
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