ENME476

Restriction: Senior standing. Credit only granted for: ENME476 or ENME489F. Formerly: ENME489F.Fundamentals of microelectromechanical systems (MEMS). Introduction to transducers and markets. MEMS fabrication processes and materials, including bulk micromachining, wet etching, dry etching, surface micromachining, sacrificial layers, film deposition, bonding, and non-traditional micromachining. Introduction to the relevant solid state physics, including crystal lattices, band structure, semiconductors, and doping. The laboratory covers safety, photolithography, profilometry, wet etching.